The NACA 6 series is obtained by conformal transformation (starting from a circle, you can find a reference here for example, but there are plenty), so there is not an easy and straight forward analystical formulation as for 4 digit and 5 digit profiles.
You can still generate your data in airfoil tool.
If you are not sure about results, you can find valuable information in the old, but still good, pdas website. In particular the resource you are searching is here or in a more "interactive" way here. Otherwise you can refer to the "bible" of airfoil data: the Abbott report. There you will find the distribution of thickness of all the airfoils of NACA and GA series.